娆х編宸插紑濮嬬爺鍙?nm CPU鎶€鏈細鍗囩骇CFET鏅朵綋绠★紵

娆х編宸插紑濮嬬爺鍙?nm CPU鎶€鏈細鍗囩骇CFET鏅朵綋绠★紵

鍦╒LSI 2020涓婏紝IMEC鍙戣〃浜嗘湁鍏冲崟鐗嘋FET鐨勬湁瓒h鏂囷紝鎴戞湁鏈轰細閲囪浜嗗叾涓竴浣嶄綔鑰匒iroura Hiroaki銆傚湪涓氱晫浼楁墍鍛ㄧ煡锛孎inFET锛團F锛夊嵆灏嗚揪鍒板叾瀹氭爣瀵垮懡銆?span style="display:none">6N6鏄惧崱涔嬪

涓夋槦宸茬粡瀹e竷锛屼粬浠皢鍦?nm鐨勬椂鍊欒浆鍚戞按骞崇撼绫崇墖锛圚orizontal Nanosheets 锛欻NS锛夈€傚彴绉數锛圱SMC锛変繚鎸?nm鐨凢F锛屼絾棰勮灏嗚浆绉诲埌2nm鐨勬柊鏋舵瀯銆?span style="display:none">6N6鏄惧崱涔嬪

鍋囪鑻辩壒灏斿綋鏃朵粛鍦ㄨ拷姹傝嚜宸辩殑鎶€鏈紝鍒欓璁¤嫳鐗瑰皵灏嗕繚鐣?nm鐨凢F锛岀劧鍚庡啀杩佺Щ鑷?nm鐨凥NS銆?/strong>6N6鏄惧崱涔嬪

璇ヨ涓氭渶鍙兘鐨勮矾绾垮浘鏄粠FF鍒板甫鏈夋垨涓嶅甫鏈塅orksheets鐨凥NS锛岀劧鍚庤繃娓″埌CFET锛圕omplimentary FETs锛夛紝璇峰弬瑙佸浘1銆?span style="display:none">6N6鏄惧崱涔嬪

娆х編宸插紑濮嬬爺鍙?nm CPU鎶€鏈細鍗囩骇CFET鏅朵綋绠★紵6N6鏄惧崱涔嬪
Imec CMOS璺嚎鍥俱€?span style="display:none">6N6鏄惧崱涔嬪

浠庝互涓婃妧鏈摑鍥炬潵鐪嬶紝28绾崇背浣跨敤浜咹igh-K/Metal Gate锛?6绾崇背---14绾崇背瀵煎叆浜咶inFET锛?绾崇背---5绾崇背閲囩敤浜咵UV鏇濆厜璁惧锛屾澶栵紝杩樺皢Co搴旂敤浜嶮iddle of Line锛圡OL锛変笂銆?span style="display:none">6N6鏄惧崱涔嬪

MOL鏄竴绉嶅皢鏅朵綋绠★紙FOEL锛変笌澶氬眰閰嶇嚎锛圔EOL锛夎繛鎺ュ湪涓€璧风殑瀛旓紙Via锛夛紝铏界劧imec浣跨敤浜咰o锛岃繕鏈夊叾浠栭€夋嫨椤瑰Mo銆丷u绛夈€?span style="display:none">6N6鏄惧崱涔嬪

姝ゅ锛?绾崇背---3绾崇背涓噰鐢ㄤ簡鍏锋湁Nanosheet缁撴瀯鐨勬櫠浣撶銆?span style="display:none">6N6鏄惧崱涔嬪

姝ゆ鐨刅LSI搴ц皥浼氫笂锛屾湁鍏?绾崇背銆?绾崇背銆?绾崇背鐨勬枃绔犲彂甯冨緱姣旇緝澶氾紝鐒惰€岋紝绗旇€呭嵈鍙戠幇灏咷ate All Around锛圙AA锛夌殑Nanosheet缁撴瀯搴旂敤鍦ㄨ繖浜涜妭鐐逛笂鐨勬儏鍐垫槸鍏ㄧ悆鍏遍€氱殑璁ょ煡銆?span style="display:none">6N6鏄惧崱涔嬪

鍚屾椂浠庢妧鏈摑鍥剧湅锛屽湪2绾崇背涓紝浣跨敤鎼浇浜咮uried Power Rail锛圔PR锛屽湪鏅朵綋绠′笅鍩嬪叆鐢垫簮绾跨殑鏋勯€狅級鐨凢orksheet鏅朵綋绠★紱鍦?绾崇背涓紝灏嗕細浣跨敤閲囩敤浜咮PR鐨凜omplementary FET锛圕FET锛夈€?span style="display:none">6N6鏄惧崱涔嬪

imec鍦ㄥ叾鍐呴儴杈炬垚浜嗕互涓嬪叡璇嗭細3绾崇背涔嬪墠閲囩敤Nanosheet銆?绾崇背閲囩敤Forksheet銆?绾崇背閲囩敤CFET銆?/strong>6N6鏄惧崱涔嬪

涔熷氨鏄锛屽湪姝ゆVLSI搴ц皥浼氫笂锛宨mec涔熸槸鍩轰簬浠ヤ笂鎶€鏈摑鍥捐€屽仛鐨勫彂琛ㄣ€備粠涓婂浘鍙互娓呮櫚鍦扮湅鍑篎inFET銆丯anosheet銆丗orksheet銆丆FET鐨勭粨鏋勫彉鍖栥€?span style="display:none">6N6鏄惧崱涔嬪

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Forksheet 鍜孋FET閫氳繃鍫嗗彔nFET鍜宲FET鍣ㄤ欢鐨凜FET鏀瑰杽n鍒皃鐨勯棿璺濇潵缂╁皬灏哄锛岃鍥?銆?span style="display:none">6N6鏄惧崱涔嬪

娆х編宸插紑濮嬬爺鍙?nm CPU鎶€鏈細鍗囩骇CFET鏅朵綋绠★紵6N6鏄惧崱涔嬪

CFET缁撴瀯鍦ㄥ綋鍓嶇殑宸ヤ綔涓紝宸茬粡寮€鍙戜簡“鍗曠墖”锛坢onolithic锛?CFET锛屾柟娉曟槸灏嗗崟鐙殑纭呯墖鐢ㄤ簬nFET鍜宲FET锛岀劧鍚庡皢瀹冧滑绮樺悎鍦ㄤ竴璧凤紝鑰屾寜鐓ч『搴忥紙sequential锛夛紝CFET鍒欎細灏嗕袱绉嶇被鍨嬬殑FET閮藉埗閫犲湪鍚屼竴纭呯墖涓娿€?span style="display:none">6N6鏄惧崱涔嬪

Imec澹扮О鍗曠墖鎶€鏈瘮椤哄簭鎶€鏈究瀹滐紝鑰岄『搴忔妧鏈姹係OI浼氬鍔犺‖搴曟垚鏈?锛咃紝瑙佸浘3銆?span style="display:none">6N6鏄惧崱涔嬪

娆х編宸插紑濮嬬爺鍙?nm CPU鎶€鏈細鍗囩骇CFET鏅朵綋绠★紵6N6鏄惧崱涔嬪

鍗曠墖CFET鐨勬垚鏈紭鍔垮湪1绾崇背涓紝IMEC閲囩敤浜嗗皢nMOS鍜宲MOS绾靛悜鎺掑垪鐨凜FET锛堝涓嬪浘8锛夛紝铏界劧CFET鐨勫伐鑹烘祦绋嬮潪甯稿鏉傦紝浣嗘鏃犵枒闂紝鏋佸ぇ鍦扮缉灏忎簡CMOS銆丼RAM鐨勯潰绉紝杈惧埌浜嗛泦鎴愬寲銆?span style="display:none">6N6鏄惧崱涔嬪

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鎴戝彂鐜拌捣濮嬫櫠鍦嗘垚鏈珮鍑虹害1锛咃紝杩欐湁涓や釜鍘熷洜锛屼竴鏄紝鎴戜笉鐩镐俊椤哄簭CFET闇€瑕丼OI锛屼簩鏄紝SOI姣旀爣鍑嗘櫠鍦嗚吹浜嗙害1锛呫€傛暣浣撴柟娉曡繕灏嗛渶瑕佷袱涓捣濮嬫櫠鍦嗭紝鑰屼笉浠呬粎鏄竴涓€?span style="display:none">6N6鏄惧崱涔嬪

鎴戣涓鸿繖绉嶆垚鏈垎鏋愰渶瑕佹洿澶氱殑璋冩煡銆傚湪鍗曠墖鏂规硶涓紝nFET鍜宲FET鍦ㄥ垎绂荤殑鏅跺渾涓婂埗閫狅紝浠庤€屽彲浠ラ拡瀵硅鍣ㄤ欢浼樺寲姣忎釜鍣ㄤ欢鐨勫埗閫犳祦绋嬨€傛瘡涓櫠鐗囩殑澶勭悊娴佺▼濡傚浘4鎵€绀恒€?span style="display:none">6N6鏄惧崱涔嬪

娆х編宸插紑濮嬬爺鍙?nm CPU鎶€鏈細鍗囩骇CFET鏅朵綋绠★紵6N6鏄惧崱涔嬪
鍥?.鍗曠墖CFET鐨勫伐鑹烘祦绋嬨€?span style="display:none">6N6鏄惧崱涔嬪

闅忕潃鎴戜滑鏈漀3鏂瑰悜鍙戝睍锛宯鍒皃鐨勫垎绂诲噺灏戜簡瀵勭敓鏁堝簲骞舵彁楂樹簡鎬ц兘銆傚悓鏍凤紝閫氳繃浠嶧F绉昏嚦GAA锛夊彲浠ュ湪鎵€鏈夊洓涓晶闈㈣€屼笉鏄笁涓晶闈笂鎻愪緵涓€涓爡鏋侊紝浠庤€屾敼鍠勪簡闈欑數鎺у埗銆?span style="display:none">6N6鏄惧崱涔嬪

杩欓」宸ヤ綔涓埗閫犵殑鍗曠墖CFET涓轰笅涓€浠e櫒浠舵彁渚涗簡椤哄簭CFET鐨勬浛浠f柟妗堬紝闇€瑕佽繘涓€姝ョ爺绌躲€?span style="display:none">6N6鏄惧崱涔嬪

娆х編宸插紑濮嬬爺鍙?nm CPU鎶€鏈細鍗囩骇CFET鏅朵綋绠★紵6N6鏄惧崱涔嬪

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