鎵撶牬鏃ョ編鍨勬柇 鍥戒骇ArF鍏夊埢鑳跺彇寰楅噸澶х獊鐮达細鍙敤浜?nm宸ヨ壓

鎵撶牬鏃ョ編鍨勬柇 鍥戒骇ArF鍏夊埢鑳跺彇寰楅噸澶х獊鐮达細鍙敤浜?nm宸ヨ壓

浣滀负鍗婂浣撳崱鑴栧瓙鐨勬妧鏈箣涓€锛屽緢澶氫汉鍙煡閬撳厜鍒绘満锛屽嵈涓嶇煡閬撳厜鍒昏兌鐨勯噸瑕佹€э紝杩欎釜甯傚満涔熸槸琚棩鏈強缇庡浗鍏徃鍨勬柇锛?span lang="EN-US">TOP5鍘傚晢鍗犱簡鍏ㄧ悆85%鐨勪唤棰濄€?span style="display:none">8XC鏄惧崱涔嬪

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鏍规嵁鍗楀ぇ鍏夌數鍏徃涔嬪墠鐨?娑堟伅锛屽叕鍙镐簬2017骞村紑濮嬬爺鍙?span lang="EN-US">“193nm 鍏夊埢鑳堕」鐩?span lang="EN-US">”锛屽凡鑾峰緱鍥藉“02 涓撻」鐨勭浉鍏抽」鐩珛椤癸紝鍏徃璁″垝閫氳繃3骞寸殑寤鸿銆佹姇浜у強瀹炵幇閿€鍞紝杈惧埌骞翠骇25鍚?span lang="EN-US"> 193nm锛?span lang="EN-US">ArF骞插紡鍜屾蹈娌″紡锛夊厜鍒昏兌浜у搧鐨勭敓浜ц妯★紝浜у搧灏嗘弧瓒抽泦鎴愮數璺涓氶渶姹傛爣鍑嗐€?span style="display:none">8XC鏄惧崱涔嬪

鎵撶牬鏃ョ編鍨勬柇 鍥戒骇ArF鍏夊埢鑳跺彇寰楅噸澶х獊鐮达細鍙敤浜?nm宸ヨ壓8XC鏄惧崱涔嬪

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